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> Multi-Axle Feedthrough
Dual Axle Ferrofluid Vacuum Feedthrough Seal Device
- Vacuum Degree :10 e-6 Pa
- Leakage Rate :10 e-12 Pa·m3·s-1
- Solid axle,Flange mouting
- without water cooling
- Product description: Dual axle ferrofluid vacuum feedthrough seal device with 2 coaxial shafts. Features vacuum degree 10 e-6 Pa, leakage rate 10 e-12 Pa·m3·s-1, high performance magnetic fluid vacuum seal with dual coaxi
Product introduction
Dual Axles (2 shafts) Single Flange Ferrofluid Vacuum Sealing Feedthrough
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Main Specifications: |
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Vacuum Degree : |
10-6 Pa |
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Leakage Rate : |
10-12 Pa·m3·s-1 |
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Pressure Resistance : |
0.5 MPa (5bar),3Mpa max |
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Temperature Range : |
0-80℃ |
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Sealing Material : |
Non-active Gas |
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Shell Material : |
Non-Magnetic Permeability Stainless Steel |
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Axle(Bush) Material : |
Magnetic Permeability Stainless Steel |
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Shell Material |
Stainless steel or Aluminum |
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Water Cooling : |
Without |
Axles (Shafts) diameter size can be customized made from 10mm to 100mm
We will design the feedthrough as per your mounting sizes and performance requirements.
A sample drawing below for refernce:
Applications
- Single Silicon Crystal Growth
- Sapphire Crystal Growth Furnace
- Vacuum Coating Equipment
- Ion Implanter
- PECVD/CVD Equipment
- Vacuum Furnace
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